Inventor

CHAO YEN-CHANG

TW5 patents

⚠️ This page may combine multiple inventors who share the name “CHAO YEN-CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

2 patents

US6934143B2Aug 23, 2005

Metal-insulator-metal capacitor structure

TAIWAN SEMICONDUCTOR MFG18 citations79

US7169626B2Jan 30, 2007

Method for detecting alignment mark shielding

TAIWAN SEMICONDUCTOR MFG3 citations59

TAIWAN SEMICONDUCTOR MFG CO LTD

2 patents

US9564357B2Feb 7, 2017

Method of forming semiconductor device using etch stop layer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46

US9144883B2Sep 29, 2015

Abrasive article, conditioning disk and method for forming abrasive article

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations44

CHAO YEN-CHANG

1 patent

US9254548B2Feb 9, 2016

Method of forming diamond conditioners for CMP process

CHAO YEN-CHANG0 citations43