Inventor
HIESTER JACOB L
US7 patents
Patents
7 patentsUS10651065B2May 12, 2020
Auto-calibration to a station of a process module that spins a wafer
LAM RES CORP6 citations82
US10991550B2Apr 27, 2021
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
LAM RES CORP7 citations81
US12489006B2Dec 2, 2025
Auto-calibration to a station of a process module that spins a wafer
LAM RES CORP0 citations60
US11742229B2Aug 29, 2023
Auto-calibration to a station of a process module that spins a wafer
LAM RES CORP0 citations60
US11239100B2Feb 1, 2022
Auto-calibration to a station of a process module that spins a wafer
LAM RES CORP0 citations60
US12586757B2Mar 24, 2026
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
LAM RES CORP0 citations59
US11594397B2Feb 28, 2023
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
LAM RES CORP0 citations59