Inventor

SZEPESI MICHELE K

US2 patents

Patents

2 patents

US7079301B2Jul 18, 2006

MEMS device and method of forming MEMS device

HEWLETT PACKARD DEVELOPMENT CO12 citations80

US6914709B2Jul 5, 2005

MEMS device and method of forming MEMS device

HEWLETT PACKARD DEVELOPMENT CO9 citations70