Inventor
NESNIDAL MICHAEL P
US10 patents
⚠️ This page may combine multiple inventors who share the name “NESNIDAL MICHAEL P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NORTHROP GRUMMAN CORP
3 patentsUS6649439B1Nov 18, 2003
Semiconductor-air gap grating fabrication using a sacrificial layer process
NORTHROP GRUMMAN CORP16 citations89
US6944373B2Sep 13, 2005
High index-step grating fabrication using a regrowth-over-dielectric process
NORTHROP GRUMMAN CORP3 citations60
US6893891B2May 17, 2005
Process for fabricating a semiconductor diffraction grating using a sacrificial layer
NORTHROP GRUMMAN CORP4 citations60