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Inventor
KABASAWA TOMOYUKI
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “KABASAWA TOMOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NAKAYAMA TAKASHI
1 patent
US8685855B2
Apr 1, 2014
Tray for CVD and method for forming film using same
NAKAYAMA TAKASHI
1 citations
46
SUMCO CORP
1 patent
US7960253B2
Jun 14, 2011
Thin silicon wafer with high gettering ability and production method thereof
SUMCO CORP
0 citations
46