Inventor

MAHATDEJKUL TIM

US2 patents

⚠️ This page may combine multiple inventors who share the name “MAHATDEJKUL TIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA CORP

1 patent

US11366307B2Jun 21, 2022

Programmable and reconfigurable mask with MEMS micro-mirror array for defect detection

KLA CORP0 citations46

KLA TENCOR CORP

1 patent

US10088345B1Oct 2, 2018

Haze and defect distribution and aperture configuration in surface metrology inspectors

KLA TENCOR CORP0 citations43