Inventor
WHITESIDE BRET
US16 patents
⚠️ This page may combine multiple inventors who share the name “WHITESIDE BRET”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
6 patentsUS9891177B2Feb 13, 2018
TDI sensor in a darkfield system
KLA TENCOR CORP56 citations96
US9664909B1May 30, 2017
Monolithic optical beam splitter with focusing lens
KLA TENCOR CORP8 citations77
US10324045B2Jun 18, 2019
Surface defect inspection with large particle monitoring and laser power control
KLA TENCOR CORP4 citations68
US9182358B2Nov 10, 2015
Multi-spot defect inspection system
KLA TENCOR CORP1 citations50
US8934091B2Jan 13, 2015
Monitoring incident beam position in a wafer inspection system
KLA TENCOR CORP0 citations48
US9678350B2Jun 13, 2017
Laser with integrated multi line or scanning beam capability
KLA TENCOR CORP0 citations40
KLA CORP
6 patentsUS12444630B2Oct 14, 2025
Single-material waveplates for pupil polarization filtering
KLA CORP0 citations60
US12322620B2Jun 3, 2025
Reflective waveplates for pupil polarization filtering
KLA CORP0 citations60
US12535431B2Jan 27, 2026
Sample inspection with multiple measurement modes
KLA CORP0 citations52
US11733172B2Aug 22, 2023
Apparatus and method for rotating an optical objective
KLA CORP0 citations51
US11181484B1Nov 23, 2021
Systems and methods for advanced defect ablation protection
KLA CORP0 citations50
US11366307B2Jun 21, 2022
Programmable and reconfigurable mask with MEMS micro-mirror array for defect detection
KLA CORP0 citations46
WOLTERS CHRISTIAN
2 patentsUS10215712B2Feb 26, 2019
Method and apparatus for producing and measuring dynamically focused, steered, and shaped oblique laser illumination for spinning wafer inspection system
WOLTERS CHRISTIAN3 citations71
US8134698B1Mar 13, 2012
Dynamic range extension in surface inspection systems
WOLTERS CHRISTIAN6 citations71