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Inventor
HELMUS PETER RICHARD
US
2 patents
Patents
2 patents
US8902562B2
Dec 2, 2014
Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp
HELMUS PETER RICHARD
4 citations
64
US9348236B2
May 24, 2016
Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp
HELMUS PETER RICHARD
1 citations
42