Inventor

HATASHITA MASAYASU

JP5 patents

⚠️ This page may combine multiple inventors who share the name “HATASHITA MASAYASU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OISHI AKIMITSU

1 patent

US8673781B2Mar 18, 2014

Plasma etching method

OISHI AKIMITSU3 citations54

MURAKAMI SHOICHI

1 patent

US9117660B2Aug 25, 2015

Apparatus, method and program for manufacturing nitride film

MURAKAMI SHOICHI0 citations45

SPP TECH CO LTD

1 patent

US10280084B2May 7, 2019

Silicon nitride film and method of making thereof

SPP TECH CO LTD0 citations43

TAIYO NIPPON SANSO CORP

1 patent

US10559459B2Feb 11, 2020

Method for producing silicon nitride film and silicon nitride film

TAIYO NIPPON SANSO CORP0 citations35

HATASHITA MASAYASU

1 patent

US8598049B2Dec 3, 2013

Deposition method

HATASHITA MASAYASU0 citations29