Inventor
SHANBHAG DAMODAR
US3 patents
Patents
3 patentsUS10760158B2Sep 1, 2020
Ex situ coating of chamber components for semiconductor processing
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US11365479B2Jun 21, 2022
Ex situ coating of chamber components for semiconductor processing
LAM RES CORP8 citations83
US10147597B1Dec 4, 2018
Turbulent flow spiral multi-zone precursor vaporizer
LAM RES CORP18 citations77