Inventor
KAWARA KATSUAKI
JP4 patents
Patents
4 patentsUS11804519B2Oct 31, 2023
Crystalline multilayer structure, semiconductor device, and method of manufacturing crystalline structure
FLOSFIA INC0 citations58
US11694894B2Jul 4, 2023
Crystalline film containing a crystalline metal oxide and method for manufacturing the same under partial pressure
FLOSFIA INC0 citations58
US10460934B2Oct 29, 2019
Crystalline film, semiconductor device including crystalline film, and method for producing crystalline film
FLOSFIA INC0 citations50
US10128349B2Nov 13, 2018
Semiconductor device
FLOSFIA INC1 citations45