Inventor
TROEGER STEFAN
DE4 patents
⚠️ This page may combine multiple inventors who share the name “TROEGER STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
3 patentsUS12105434B2Oct 1, 2024
Assembly, in particular in a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations51
US11526089B2Dec 13, 2022
Compensation of creep effects in an imaging device
ZEISS CARL SMT GMBH0 citations44
US10571816B2Feb 25, 2020
Assembly in a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations44