Inventor
BAEK SEUNGHAN
KR2 patents
Patents
2 patentsUS12494352B2Dec 9, 2025
Plasma confinement ring, semiconductor manufacturing apparatus including the same, and method of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations45
US12183555B2Dec 31, 2024
Substrate processing apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations43