Inventor
HITZFELD ROBERT
US3 patents
Patents
3 patentsUS6627051B2Sep 30, 2003
Cathode current control system for a wafer electroplating apparatus
SEMITOOL INC57 citations95
US6322674B1Nov 27, 2001
Cathode current control system for a wafer electroplating apparatus
SEMITOOL INC62 citations95
US6843894B2Jan 18, 2005
Cathode current control system for a wafer electroplating apparatus
SEMITOOL INC24 citations91