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Inventor
QUENTIN CHRISTOPHER G
US
2 patents
Patents
2 patents
US7335266B2
Feb 26, 2008
Method of forming a controlled and uniform lightly phosphorous doped silicon film
APPLIED MATERIALS INC
7 citations
72
US6982214B2
Jan 3, 2006
Method of forming a controlled and uniform lightly phosphorous doped silicon film
APPLIED MATERIALS INC
7 citations
72