Inventor
WISWELL NICHOLAS
US5 patents
Patents
5 patentsUS11577356B2Feb 14, 2023
Machine vision as input to a CMP process control algorithm
APPLIED MATERIALS INC3 citations72
US11507824B2Nov 22, 2022
Training spectrum generation for machine learning system for spectrographic monitoring
APPLIED MATERIALS INC2 citations72
US11701749B2Jul 18, 2023
Monitoring of vibrations during chemical mechanical polishing
APPLIED MATERIALS INC1 citations62
US11660722B2May 30, 2023
Polishing system with capacitive shear sensor
APPLIED MATERIALS INC1 citations61
US11651207B2May 16, 2023
Training spectrum generation for machine learning system for spectrographic monitoring
APPLIED MATERIALS INC0 citations61