Inventor
LO CHI-WEI
US12 patents
⚠️ This page may combine multiple inventors who share the name “LO CHI-WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS9683308B2Jun 20, 2017
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
APPLIED MATERIALS INC8 citations82
US10837122B2Nov 17, 2020
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
APPLIED MATERIALS INC0 citations50
US10428441B2Oct 1, 2019
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
APPLIED MATERIALS INC0 citations50
JIANG HONGRUI
2 patentsASM IP HOLDING BV
2 patentsUS10797133B2Oct 6, 2020
Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures
ASM IP HOLDING BV2 citations72
US11296189B2Apr 5, 2022
Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures
ASM IP HOLDING BV0 citations61