P

Inventor

CHOU CHIH-CHUNG

TW34 patents
⚠️ This page may combine multiple inventors who share the name “CHOU CHIH-CHUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

19 patents
US11446711B2Sep 20, 2022

Steam treatment stations for chemical mechanical polishing system

APPLIED MATERIALS INC8 citations85
US11577358B2Feb 14, 2023

Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishing

APPLIED MATERIALS INC4 citations74
US11633833B2Apr 25, 2023

Use of steam for pre-heating of CMP components

APPLIED MATERIALS INC3 citations72
US12296427B2May 13, 2025

Apparatus and method for CMP temperature control

APPLIED MATERIALS INC1 citations64
US12528151B2Jan 20, 2026

Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishing

APPLIED MATERIALS INC0 citations62
US12459011B2Nov 4, 2025

Steam treatment stations for chemical mechanical polishing system

APPLIED MATERIALS INC0 citations62
US12434347B2Oct 7, 2025

Method for CMP temperature control

APPLIED MATERIALS INC0 citations62
US12030093B2Jul 9, 2024

Steam treatment stations for chemical mechanical polishing system

APPLIED MATERIALS INC0 citations62
US11865671B2Jan 9, 2024

Temperature-based in-situ edge assymetry correction during CMP

APPLIED MATERIALS INC0 citations62
US11701749B2Jul 18, 2023

Monitoring of vibrations during chemical mechanical polishing

APPLIED MATERIALS INC1 citations62
US11628478B2Apr 18, 2023

Steam cleaning of CMP components

APPLIED MATERIALS INC0 citations62
US12459078B2Nov 4, 2025

In-situ conditioner disk cleaning during CMP

APPLIED MATERIALS INC0 citations61
US11660722B2May 30, 2023

Polishing system with capacitive shear sensor

APPLIED MATERIALS INC1 citations61
US12233505B2Feb 25, 2025

Polishing system with capacitive shear sensor

APPLIED MATERIALS INC0 citations60
US12148647B2Nov 19, 2024

Integrated substrate measurement system

APPLIED MATERIALS INC0 citations46
US11819976B2Nov 21, 2023

Spray system for slurry reduction during chemical mechanical polishing (cmp)

APPLIED MATERIALS INC0 citations46
US12533771B2Jan 27, 2026

Polishing slurry dispense nozzle

APPLIED MATERIALS INC0 citations44
US10610994B2Apr 7, 2020

Polishing system with local area rate control and oscillation mode

APPLIED MATERIALS INC0 citations41
US10434623B2Oct 8, 2019

Local area polishing system and polishing pad assemblies for a polishing system

APPLIED MATERIALS INC0 citations41

O2MICRO INC

4 patents

CHOU CHIH-CHUNG

3 patents

SUNHO BIODIESEL CORP

2 patents

TSAI DIN PING

1 patent

KINIK CO

1 patent

HUANG WEI

1 patent

HO CHAN-HSIAO

1 patent

HO CHAN-HAIAO

1 patent

CHINA PETROCHEMICAL DEV CORP

1 patent