Inventor
BIOLSI PETER E
US4 patents
Patents
4 patentsUS7030031B2Apr 18, 2006
Method for forming damascene structure utilizing planarizing material coupled with diffusion barrier material
IBM69 citations95
US6677678B2Jan 13, 2004
Damascene structure using a sacrificial conductive layer
IBM110 citations94
US6444557B1Sep 3, 2002
Method of forming a damascene structure using a sacrificial conductive layer
IBM22 citations89
US7214608B2May 8, 2007
Interlevel dielectric layer and metal layer sealing
IBM4 citations62