Inventor
UPHAM ALLAN W
US4 patents
Patents
4 patentsUS7030031B2Apr 18, 2006
Method for forming damascene structure utilizing planarizing material coupled with diffusion barrier material
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US9184042B1Nov 10, 2015
Wafer backside particle mitigation
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US9318347B2Apr 19, 2016
Wafer backside particle mitigation
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US9331073B2May 3, 2016
Epitaxially grown quantum well finFETs for enhanced pFET performance
IBM0 citations40