Inventor

SRINIVAS RAMANUJAPURAN A

US3 patents

Patents

3 patents

US6939804B2Sep 6, 2005

Formation of composite tungsten films

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US7605083B2Oct 20, 2009

Formation of composite tungsten films

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US7384867B2Jun 10, 2008

Formation of composite tungsten films

APPLIED MATERIALS INC16 citations92