Inventor
LEVY KENNETH
5 patents
⚠️ This page may combine multiple inventors who share the name “LEVY KENNETH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA INSTR CORP
4 patentsUS4247203AJan 27, 1981
Automatic photomask inspection system and apparatus
KLA INSTR CORP281 citations97
US4644172AFeb 17, 1987
Electronic control of an automatic wafer inspection system
KLA INSTR CORP278 citations96
US4347001AAug 31, 1982
Automatic photomask inspection system and apparatus
KLA INSTR CORP157 citations96
US4579455AApr 1, 1986
Photomask inspection apparatus and method with improved defect detection
KLA INSTR CORP280 citations94