Inventor
CHUNG HSUEH-YI
TW7 patents
⚠️ This page may combine multiple inventors who share the name “CHUNG HSUEH-YI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS11003091B2May 11, 2021
Method of fabricating reticle
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10534272B2Jan 14, 2020
Method of fabricating reticle
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10073354B2Sep 11, 2018
Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11940737B2Mar 26, 2024
Method of fabricating reticle
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US9908201B2Mar 6, 2018
Systems and methods for edge bead removal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49