Inventor

LIAO CHI-HUNG

TW121 patents

⚠️ This page may combine multiple inventors who share the name “LIAO CHI-HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LIAO CHI-HUNG

TAIWAN SEMICONDUCTOR MFG CO LTD

Lithography system and operation method thereof

Photolithography method and photolithography system

Mask for lithography process and method for manufacturing the same

Substrate measuring device and a method of using the same

System and method for thermal management of reticle in semiconductor manufacturing

Substrate measuring device and a method of using the same

Tool and method for cleaning electrostatic chuck

Radiation source supply system for lithographic tools

Cleaning method and apparatus

Dispensing nozzle design and dispensing method thereof

Substrate detecting system in a substrate storage container

Radiation source supply system for lithographic tools

Method of fabricating reticle

Conductive fill

Method of fabricating reticle

Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool

Conductive interconnect structures in integrated circuits

Method and apparatus for improving critical dimension variation

Method and apparatus for improving critical dimension variation

System and method for defect analysis of a substrate

Method for handling mask and lithography apparatus

Photomask having recessed region

Photomask having recessed region

Photomask having recessed region

Dispensing nozzle design and dispensing method thereof

Method for cleaning electrostatic chuck

Method for cleaning electrostatic chuck

Method for lithography process

Lithography system and operation method thereof

Method of performing a substrate detection process

Chemical mechanical polishing method

Substrate measuring device and a method of using the same

Photolithography method and photolithography system

Method of fabricating reticle

Cleaning method and apparatus

Substrate table with vacuum channels grid

Method and apparatus for controlling droplet in extreme ultraviolet light source

System and method for thermal management of reticle in semiconductor manufacturing

Lithography system and operation method thereof

Radiation source supply system for lithographic tools

Temperature controlling apparatus

Reticle cleaning system

TAIWAN SEMICONDUCTOR MFG

Method to reduce device contact resistance using a hydrogen peroxide treatment

System and method for defect analysis of a substrate

Method of wafer height mapping

LIN HUI-HSIUNG

Light mixing module

INST NUCLEAR ENERGY RES

Vermiculite supported catalyst for CO preferential oxidation and the process of preparing the same

HIMAX TECH LTD

Power circuit, gate driver and related operation control method for multi-source display system

TAIWAN SEMICONDUCTOR MFG LTD

Efficient method for monitoring gate oxide damage related to plasma etch chamber processing history

TAIWAN GREEN POINT ENTPR CO

Injection molding method and mold mechanism