Inventor
CHUANG JUI-PING
TW26 patents
⚠️ This page may combine multiple inventors who share the name “CHUANG JUI-PING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
20 patentsUS9553090B2Jan 24, 2017
Structure and formation method of semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD30 citations98
US9899271B2Feb 20, 2018
Structure and formation method of semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD17 citations94
US9559205B2Jan 31, 2017
Structure and formation method of semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD23 citations94
US10326005B2Jun 18, 2019
Structure and formation method of semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US9733568B2Aug 15, 2017
Tool and method of developing
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations82
US10686059B2Jun 16, 2020
Structure of semiconductor device structure having fins
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11003091B2May 11, 2021
Method of fabricating reticle
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10534272B2Jan 14, 2020
Method of fabricating reticle
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10073354B2Sep 11, 2018
Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10627718B2Apr 21, 2020
Developing method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US10101662B2Oct 16, 2018
Developing method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US11940737B2Mar 26, 2024
Method of fabricating reticle
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11682716B2Jun 20, 2023
Structure of semiconductor device structure having fins
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11150558B2Oct 19, 2021
Developing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10686060B2Jun 16, 2020
Structure and formation method of semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10014394B2Jul 3, 2018
Structure and formation method of semiconductor device with metal gate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9728533B2Aug 8, 2017
Aqueous cleaning techniques and compositions for use in semiconductor device manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US9908201B2Mar 6, 2018
Systems and methods for edge bead removal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10276469B2Apr 30, 2019
Method for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations40
US9704714B2Jul 11, 2017
Method for controlling surface charge on wafer surface in semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations40
TAIWAN SEMICONDUCTOR MFG
4 patentsUS6553335B2Apr 22, 2003
Method and apparatus for determining end-point in a chamber cleaning process
TAIWAN SEMICONDUCTOR MFG19 citations79
US6524959B1Feb 25, 2003
Chemical mechanical polish (CMP) planarizing method employing derivative signal end-point monitoring and control
TAIWAN SEMICONDUCTOR MFG11 citations73
US6429130B1Aug 6, 2002
Method and apparatus for end point detection in a chemical mechanical polishing process using two laser beams
TAIWAN SEMICONDUCTOR MFG12 citations73
US6716740B2Apr 6, 2004
Method for depositing silicon oxide incorporating an outgassing step
TAIWAN SEMICONDUCTOR MFG6 citations60