Inventor
CARLOS VINCENT J
US3 patents
Patents
3 patentsUS6944578B2Sep 13, 2005
Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus
IBM9 citations69
US6917901B2Jul 12, 2005
Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus
IBM8 citations69
US7060626B2Jun 13, 2006
Multi-run selective pattern and etch wafer process
IBM5 citations55