Inventor · disambiguated record
Joseph E. Shaver
Also filed as: SHAVER JOSEPH E
2 granted patents·17 citations·filing 2002–2004
60Inventor score
Technology areasG03F
Files withIBM2
Top patents by PatentIndex Score
2 records- 0167US6944578B2Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focusIBM·Filed 2004·Granted Sep 13, 2005·9 cites·6 claims
- 0265US6917901B2Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focusIBM·Filed 2002·Granted Jul 12, 2005·8 cites·26 claims
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