Inventor

KOH AKITERU

JP4 patents

Patents

4 patents

US7473377B2Jan 6, 2009

Plasma processing method

TOKYO ELECTRON LTD14 citations80

US7192532B2Mar 20, 2007

Dry etching method

TOKYO ELECTRON LTD0 citations50

US7179752B2Feb 20, 2007

Dry etching method

TOKYO ELECTRON LTD1 citations49

US7183217B2Feb 27, 2007

Dry-etching method

TOKYO ELECTRON LTD1 citations47