Inventor
WU WEI-CHING
TW9 patents
⚠️ This page may combine multiple inventors who share the name “WU WEI-CHING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS12020905B2Jun 25, 2024
Method of using high density plasma chemical vapor deposition chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11342164B2May 24, 2022
High density plasma chemical vapor deposition chamber and method of using
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10910199B2Feb 2, 2021
Method of controlling an adjustable nozzle and method of making a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10043892B2Aug 7, 2018
Method for manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48