Inventor
LEE WEN-LONG
TW14 patents
⚠️ This page may combine multiple inventors who share the name “LEE WEN-LONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
6 patentsUS12020905B2Jun 25, 2024
Method of using high density plasma chemical vapor deposition chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11342164B2May 24, 2022
High density plasma chemical vapor deposition chamber and method of using
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10910199B2Feb 2, 2021
Method of controlling an adjustable nozzle and method of making a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US9349733B2May 24, 2016
Gate structure having spacer with flat top surface and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations59
US9048185B2Jun 2, 2015
Profile pre-shaping for replacement poly gate interlayer dielectric
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9859137B2Jan 2, 2018
Substrate heat treatment apparatus and heat treatment method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations30
TAIWAN SEMICONDUCTOR MFG
5 patentsUS7851358B2Dec 14, 2010
Low temperature method for minimizing copper hillock defects
TAIWAN SEMICONDUCTOR MFG8 citations84
US7635651B2Dec 22, 2009
Method of smoothening dielectric layer
TAIWAN SEMICONDUCTOR MFG12 citations84
US6585826B2Jul 1, 2003
Semiconductor wafer cleaning method to remove residual contamination including metal nitride particles
TAIWAN SEMICONDUCTOR MFG10 citations71
US7368383B2May 6, 2008
Hillock reduction in copper films
TAIWAN SEMICONDUCTOR MFG1 citations49
US7611589B2Nov 3, 2009
Methods of spin-on wafer cleaning
TAIWAN SEMICONDUCTOR MFG1 citations48