Inventor

STANDIFORD KEITH

US5 patents

⚠️ This page may combine multiple inventors who share the name “STANDIFORD KEITH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STANDIFORD KEITH

2 patents

US8063365B1Nov 22, 2011

Non-shot-noise-limited source for electron beam lithography or inspection

STANDIFORD KEITH8 citations78

US9040942B1May 26, 2015

Electron beam lithography with linear column array and rotary stage

STANDIFORD KEITH5 citations69

UNIV CALIFORNIA

1 patent

US7084407B2Aug 1, 2006

Ion beam extractor with counterbore

UNIV CALIFORNIA29 citations92

KLA TENCOR TECH CORP

1 patent

US7241991B1Jul 10, 2007

Region-of-interest based electron beam metrology

KLA TENCOR TECH CORP10 citations79

KLA TENCOR CORP

1 patent

US9715995B1Jul 25, 2017

Apparatus and methods for electron beam lithography using array cathode

KLA TENCOR CORP0 citations40