P

Inventor

RIESCHL SVEN UWE

CH4 patents
⚠️ This page may combine multiple inventors who share the name “RIESCHL SVEN UWE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EVATEC AG

3 patents
US10202682B2Feb 12, 2019

Method of sputtering and sputter system

EVATEC AG12 citations81
US10388559B2Aug 20, 2019

Apparatus for depositing a layer on a substrate in a processing gas

EVATEC AG13 citations80
US9624572B2Apr 18, 2017

Method of HIPIMS sputtering and HIPIMS sputter system

EVATEC AG2 citations70

RIESCHL SVEN UWE

1 patent
US9490166B2Nov 8, 2016

Apparatus and method for depositing a layer onto a substrate

RIESCHL SVEN UWE3 citations63