Inventor
AIBA YASUSHI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “AIBA YASUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS9536782B2Jan 3, 2017
Tungsten film forming method, semiconductor device manufacturing method, and storage medium
TOKYO ELECTRON LTD9 citations83
US10026616B2Jul 17, 2018
Method of reducing stress in metal film and metal film forming method
TOKYO ELECTRON LTD4 citations72
US9472454B2Oct 18, 2016
Tungsten film forming method
TOKYO ELECTRON LTD5 citations71
US9536745B2Jan 3, 2017
Tungsten film forming method
TOKYO ELECTRON LTD5 citations70
US6387445B1May 14, 2002
Tungsten layer forming method and laminate structure of tungsten layer
TOKYO ELECTRON LTD3 citations60
US7718005B2May 18, 2010
Film forming equipment and film forming method
TOKYO ELECTRON LTD2 citations59
US10131986B2Nov 20, 2018
Method of forming metal film
TOKYO ELECTRON LTD1 citations51
US9938620B2Apr 10, 2018
Gas supply mechanism, gas supplying method, film forming apparatus and film forming method using the same
TOKYO ELECTRON LTD1 citations51