Inventor
ENZU MASAKI
JP12 patents
Patents
12 patentsUS12104245B2Oct 1, 2024
Compound, thin-film forming raw material that contains said compound, and method of manufacturing thin film
ADEKA CORP3 citations72
US9994593B2Jun 12, 2018
Copper compound, starting material for forming thin film, and method for manufacturing thin film
ADEKA CORP2 citations72
US10920313B2Feb 16, 2021
Diazadienyl compound, raw material for forming thin film, and method for manufacturing thin film
ADEKA CORP0 citations62
US12264168B2Apr 1, 2025
Ruthenium compound, thin-film forming raw material, and method of producing thin film
ADEKA CORP0 citations61
US11760771B2Sep 19, 2023
Ruthenium compound, raw material for forming thin film, and method for producing thin film
ADEKA CORP0 citations59
US10253408B2Apr 9, 2019
Compound, thin film-forming material, and thin film manufacturing method
ADEKA CORP1 citations57
US10351584B2Jul 16, 2019
Alkoxide compound, raw material for forming thin film, method for manufacturing thin film, and alcohol compound
ADEKA CORP0 citations51
US10167304B2Jan 1, 2019
Ruthenium compound, material for thin film formation, and process for thin film formation
ADEKA CORP0 citations51
US12559839B2Feb 24, 2026
Indium compound, thin-film forming raw material, thin film, and method of producing same
ADEKA CORP0 citations50
US11408069B2Aug 9, 2022
Method for producing metallic ruthenium thin film by atomic layer deposition
ADEKA CORP0 citations50
US12516415B2Jan 6, 2026
Reactive material and method of producing thin-film
ADEKA CORP0 citations49
US10011623B2Jul 3, 2018
Alkoxide compound, thin film-forming starting material, and thin film formation method
ADEKA CORP0 citations40