Inventor

BABIN SERGEY

US7 patents

⚠️ This page may combine multiple inventors who share the name “BABIN SERGEY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

4 patents

US6720565B2Apr 13, 2004

Real-time prediction of and correction of proximity resist heating in raster scan particle beam lithography

APPLIED MATERIALS INC60 citations94

US6373071B1Apr 16, 2002

Real-time prediction of proximity resist heating and correction of raster scan electron beam lithography

APPLIED MATERIALS INC32 citations91

US6455863B1Sep 24, 2002

Apparatus and method for forming a charged particle beam of arbitrary shape

APPLIED MATERIALS INC16 citations83

US6420717B1Jul 16, 2002

Method and apparatus for real-time correction of resist heating in lithography

APPLIED MATERIALS INC13 citations72

ETEC SYSTEMS INC

2 patents

US5847959ADec 8, 1998

Method and apparatus for run-time correction of proximity effects in pattern generation

ETEC SYSTEMS INC177 citations96

US6326635B1Dec 4, 2001

Minimization of electron fogging in electron beam lithography

ETEC SYSTEMS INC12 citations71

NAWO TEC GMBH

1 patent

US7786403B2Aug 31, 2010

Method for high-resolution processing of thin layers using electron beams

NAWO TEC GMBH6 citations67