Inventor
KOROP EVGENII DMITREEVITCH
RU3 patents
Patents
3 patentsUS6818912B2Nov 16, 2004
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations71
US6667484B2Dec 23, 2003
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV9 citations71
USRE41362EJun 1, 2010
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV3 citations60