Inventor
IVANOV VLADIMIR VITAL EVITCH
RU7 patents
Patents
7 patentsUS6614505B2Sep 2, 2003
Lithographic projection apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV99 citations97
US7528395B2May 5, 2009
Radiation source, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations80
US6933510B2Aug 23, 2005
Radiation source, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV16 citations79
US6862075B2Mar 1, 2005
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby
ASML NETHERLANDS BV8 citations73
US6818912B2Nov 16, 2004
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations71
US6667484B2Dec 23, 2003
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV9 citations71
USRE41362EJun 1, 2010
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV3 citations60