Inventor

BUTTINGER RICHARD

DE2 patents

⚠️ This page may combine multiple inventors who share the name “BUTTINGER RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EHRKE HANS-ULRICH

1 patent

US7168607B2Jan 30, 2007

Method and device for cleaning and then bonding substrates

EHRKE HANS-ULRICH11 citations70

SUESS MICRO TEC LITHOGRAPHY GM

1 patent

US6891602B2May 10, 2005

Device for aligning masks in photolithography

SUESS MICRO TEC LITHOGRAPHY GM1 citations30