Inventor
ANAZAWA NORIMICHI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “ANAZAWA NORIMICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HOLON CO LTD
3 patentsUS6686591B2Feb 3, 2004
Apparatus for inspecting mask
HOLON CO LTD32 citations90
US7375328B2May 20, 2008
Charged particle beam apparatus and contamination removal method therefor
HOLON CO LTD7 citations72
US7409309B2Aug 5, 2008
Method of deciding the quality of the measurement value by the edge width
HOLON CO LTD3 citations55