Inventor

VAN DER HEIJDEN EDDY CORNELIS ANTONIUS

NL4 patents

⚠️ This page may combine multiple inventors who share the name “VAN DER HEIJDEN EDDY CORNELIS ANTONIUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US7992115B2Aug 2, 2011

Overlay measurement on double patterning substrate

ASML NETHERLANDS BV12 citations77

US10551736B2Feb 4, 2020

Methods for providing lithography features on a substrate by self-assembly of block copolymers

ASML NETHERLANDS BV1 citations60

US10240250B2Mar 26, 2019

Method to provide a patterned orientation template for a self-assemblable polymer

ASML NETHERLANDS BV1 citations58

VAN DER HEIJDEN EDDY CORNELIS ANTONIUS

1 patent

US8119333B2Feb 21, 2012

Lithographic method

VAN DER HEIJDEN EDDY CORNELIS ANTONIUS0 citations38