Inventor
Wiltse John
US4 patents
Patents
4 patentsUS10358722B2Jul 23, 2019
Showerhead assembly
LAM RES CORP15 citations81
US11230765B2Jan 25, 2022
Actuator to adjust dynamically showerhead tilt in a semiconductor-processing apparatus
LAM RES CORP0 citations56
US10533251B2Jan 14, 2020
Actuator to dynamically adjust showerhead tilt in a semiconductor processing apparatus
LAM RES CORP1 citations56
US12410519B2Sep 9, 2025
Automated showerhead tilt adjustment
LAM RES CORP0 citations41