Inventor
BROOKS MITCHELL
US6 patents
⚠️ This page may combine multiple inventors who share the name “BROOKS MITCHELL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS11211253B2Dec 28, 2021
Atomic layer deposition and etch in a single plasma chamber for critical dimension control
LAM RES CORP8 citations82
US10734238B2Aug 4, 2020
Atomic layer deposition and etch in a single plasma chamber for critical dimension control
LAM RES CORP10 citations82
US10658174B2May 19, 2020
Atomic layer deposition and etch for reducing roughness
LAM RES CORP3 citations68
US11170997B2Nov 9, 2021
Atomic layer deposition and etch for reducing roughness
LAM RES CORP0 citations57