Inventor
NGUYEN SHAWN D
US4 patents
Patents
4 patentsUS12359309B2Jul 15, 2025
Group VI metal deposition process
ENTEGRIS INC0 citations60
US12252787B2Mar 18, 2025
Methods for depositing tungsten or molybdenum films
ENTEGRIS INC0 citations60
US11761081B2Sep 19, 2023
Methods for depositing tungsten or molybdenum films
ENTEGRIS INC1 citations60
US12264392B2Apr 1, 2025
Silicon precursor compounds and method for forming silicon-containing films
ENTEGRIS INC0 citations49