Inventor
COEURET FRAN OIS
FR2 patents
Patents
2 patentsUS5576076ANov 19, 1996
Process for creating a deposit of silicon oxide on a traveling solid substrate
AIR LIQUIDE70 citations93
US5807614ASep 15, 1998
Method and device for forming an excited gaseous atmosphere lacking electrically charged species used for treating nonmetallic substrates
AIR LIQUIDE42 citations90