Inventor

ZHUANG JIAN-PING

US3 patents

Patents

3 patents

US6267005B1Jul 31, 2001

Dual stage instrument for scanning a specimen

KLA TENCOR CORP119 citations97

US5866806AFeb 2, 1999

System for locating a feature of a surface

KLA TENCOR CORP98 citations93

US7100430B2Sep 5, 2006

Dual stage instrument for scanning a specimen

KLA TENCOR CORP27 citations91