Inventor
REDER STEVEN
US4 patents
Patents
4 patentsUS6874510B2Apr 5, 2005
Method to use a laser to perform the edge clean operation on a semiconductor wafer
LSI LOGIC CORP27 citations90
US6650958B1Nov 18, 2003
Integrated process tool monitoring system for semiconductor fabrication
LSI LOGIC CORP20 citations87
US7198546B2Apr 3, 2007
Method to monitor pad wear in CMP processing
LSI LOGIC CORP10 citations80
US6869893B2Mar 22, 2005
Laminate low K film
LSI LOGIC CORP2 citations60