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Inventor
TALALAEVSKI ALEXANDER
IL
2 patents
Patents
2 patents
US6894383B2
May 17, 2005
Reduced substrate micro-electro-mechanical systems (MEMS) device and system for producing the same
INTEL CORP
7 citations
69
US7608470B2
Oct 27, 2009
Interconnection device including one or more embedded vias and method of producing the same
INTEL CORP
3 citations
53