Inventor
YOSHIDA Motoru
JP10 patents
Patents
10 patentsUS10707146B2Jul 7, 2020
Semiconductor device and method for manufacturing same, for releaved stress and high heat conductivity
MITSUBISHI ELECTRIC CORP2 citations71
US9842738B2Dec 12, 2017
Method for manufacturing silicon carbide semiconductor device and silicon carbide semiconductor device
MITSUBISHI ELECTRIC CORP2 citations70
US12322605B2Jun 3, 2025
Semiconductor device and method of manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations61
US11195803B2Dec 7, 2021
Semiconductor element, semiconductor device, power conversion device, and method of manufacturing semiconductor element
MITSUBISHI ELECTRIC CORP0 citations61
US11830795B2Nov 28, 2023
Semiconductor device, power conversion device, and method for manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations51
US11158511B2Oct 26, 2021
Semiconductor device and power converter including a copper film with a small grain size stress relaxtion layer
MITSUBISHI ELECTRIC CORP0 citations49
US10697078B2Jun 30, 2020
Method of forming Cu plating, method of manufacturing Cu-plated substrate, and Cu-plated substrate
MITSUBISHI ELECTRIC CORP0 citations49
US10276502B2Apr 30, 2019
Semiconductor device and method for manufacturing same
MITSUBISHI ELECTRIC CORP0 citations49
US10529587B2Jan 7, 2020
Semiconductor device and method of manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations40
US9721915B2Aug 1, 2017
Semiconductor device
MITSUBISHI ELECTRIC CORP0 citations38