Inventor
SOHN IL-HYUN
KR3 patents
Patents
3 patentsUS7037852B2May 2, 2006
Composition for stripping photoresist and method of preparing the same
SAMSUNG ELECTRONICS CO LTD2 citations61
US6713440B2Mar 30, 2004
Resist and etching by-product removing composition and resist removing method using the same
SAMSUNG ELECTRONICS CO LTD3 citations61
US7223721B2May 29, 2007
Resist and etching by-product removing composition and resist removing method using the same
SAMSUNG ELECTRONICS CO LTD1 citations51