Inventor

UMEZAKI TOMONORI

JP11 patents

⚠️ This page may combine multiple inventors who share the name “UMEZAKI TOMONORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CENTRAL GLASS CO LTD

4 patents

US12325934B2Jun 10, 2025

Single-crystal silicon carbide wafer, and single-crystal silicon carbide ingot

CENTRAL GLASS CO LTD0 citations55

US11643748B2May 9, 2023

Silicon carbide single crystal

CENTRAL GLASS CO LTD0 citations55

US12325935B2Jun 10, 2025

Single-crystal silicon carbide wafer, single-crystal silicon carbide ingot, and method for producing single-crystal silicon carbide

CENTRAL GLASS CO LTD0 citations51

US9230821B2Jan 5, 2016

Dry etching agent and dry etching method using the same

CENTRAL GLASS CO LTD0 citations51

UMEZAKI TOMONORI

2 patents

US9017571B2Apr 28, 2015

Dry etching agent and dry etching method

UMEZAKI TOMONORI12 citations80

US9165776B2Oct 20, 2015

Dry etching method

UMEZAKI TOMONORI1 citations48

SCREEN HOLDINGS CO LTD

1 patent

US9852914B2Dec 26, 2017

Sacrificial-film removal method and substrate processing device

SCREEN HOLDINGS CO LTD1 citations51

KIMURA MASAHIRO

1 patent

US9082725B2Jul 14, 2015

Pattern forming method

KIMURA MASAHIRO1 citations50

GUNJI ISAO

1 patent

US8562751B2Oct 22, 2013

Dry cleaning method of substrate processing apparatus

GUNJI ISAO0 citations46

UNIV NAGOYA NAT UNIV CORP

1 patent

US10151046B2Dec 11, 2018

Method for producing crystal of silicon carbide, and crystal production device

UNIV NAGOYA NAT UNIV CORP0 citations45

HIBINO YASUO

1 patent

US9093388B2Jul 28, 2015

Dry etching agent and dry etching method using the same

HIBINO YASUO0 citations45